Title :
Integrated uncooled infrared detector imaging arrays
Author :
Wood, R.A. ; Han, C.J. ; Kruse, P.W.
Author_Institution :
Honeywell Inc., Sensor & System Dev. Center, Bloomington, MN, USA
Abstract :
The authors describe a new type of infrared (IR) focal plane consisting of a 2-D array of microminiature bolometers (microbolometers) fabricated, complete with readout electronics, as a monolithic silicon chip. These focal planes require no cooling for sensitive detection of IR radiation. The authors report high-quality IR imaging obtained with such focal planes.<>
Keywords :
bolometers; elemental semiconductors; image sensors; infrared detectors; infrared imaging; silicon; 2D; IR imaging; Si; focal planes; microbolometers; microminiature bolometers; uncooled infrared detector imaging arrays; Cameras; Cathodes; Cryogenics; Electrons; Image converters; Image intensifiers; Infrared detectors; Lighting; Optical imaging; Sensor arrays;
Conference_Titel :
Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest., IEEE
Conference_Location :
Hilton Head Island, SC, USA
Print_ISBN :
0-7803-0456-X
DOI :
10.1109/SOLSEN.1992.228308
