Title :
Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry
Author :
Yun, Weijie ; Howe, Roger T. ; Gray, Paul R.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
Abstract :
The authors have described a surface micromachined accelerometer with digital electrostatic feedback using Sigma - Delta modulation technique, fabricated in a modular CMOS/microstructure process. Detection circuits have been tested successfully. The unity gain buffer with low input capacitance can also be used for other capacitive detection applications. The accelerometer has been characterized in the self-testing mode and has demonstrated the functionality of the device.<>
Keywords :
CMOS integrated circuits; accelerometers; electric sensing devices; feedback; integrated circuit technology; IC technology; capacitive detection; digital electrostatic feedback; digitally force-balanced accelerometer; integrated CMOS detection; self-testing; Accelerometers; Actuators; Built-in self-test; CMOS digital integrated circuits; Capacitive sensors; Fabrication; Micromachining; Parasitic capacitance; Residual stresses; Silicon;
Conference_Titel :
Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest., IEEE
Conference_Location :
Hilton Head Island, SC, USA
Print_ISBN :
0-7803-0456-X
DOI :
10.1109/SOLSEN.1992.228309
