• DocumentCode
    3264858
  • Title

    Chemical analysis and electrophoresis systems integrated on glass and silicon chips

  • Author

    Harrison, D.J. ; Seiler, K. ; Manz, A. ; Zhonghui Fan

  • Author_Institution
    Dept. of Chem., Alberta Univ., Edmonton, Alta., Canada
  • fYear
    1992
  • fDate
    22-25 June 1992
  • Firstpage
    110
  • Lastpage
    113
  • Abstract
    The feasibility of miniaturizing a chemical analysis system on a planar substrate has been demonstrated for a system utilizing electrokinetic phenomenon for sample separation and solvent pumping. Using micromachining techniques, a manifold of capillary channels has been fabricated in a planar glass substrate. Separation of components of a mixture using electrophoresis has been achieved within the channels using applied voltages of up to 10 kV. The separation efficiency was in agreement with theory, indicating no interactions between the analyte and the glass walls. Solvent flow could be directed along a specified capillary by application of appropriate voltages, so that valveless switching of fluid flow between capillaries could be achieved.<>
  • Keywords
    capillarity; chemical analysis; chemical sensors; electric sensing devices; electrophoresis; elemental semiconductors; glass; semiconductor technology; silicon; substrates; 10 kV; Si; capillary channels; chemical analysis; electrokinetic phenomenon; electrophoresis; feasibility; fluid flow; glass substrate; micromachining; planar substrate; sample separation; separation efficiency; solvent pumping; valveless switching; Chemical analysis; Chemistry; Electrokinetics; Fluid flow; Glass; Micromachining; Pumps; Silicon; Solvents; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest., IEEE
  • Conference_Location
    Hilton Head Island, SC, USA
  • Print_ISBN
    0-7803-0456-X
  • Type

    conf

  • DOI
    10.1109/SOLSEN.1992.228313
  • Filename
    228313