DocumentCode
3264858
Title
Chemical analysis and electrophoresis systems integrated on glass and silicon chips
Author
Harrison, D.J. ; Seiler, K. ; Manz, A. ; Zhonghui Fan
Author_Institution
Dept. of Chem., Alberta Univ., Edmonton, Alta., Canada
fYear
1992
fDate
22-25 June 1992
Firstpage
110
Lastpage
113
Abstract
The feasibility of miniaturizing a chemical analysis system on a planar substrate has been demonstrated for a system utilizing electrokinetic phenomenon for sample separation and solvent pumping. Using micromachining techniques, a manifold of capillary channels has been fabricated in a planar glass substrate. Separation of components of a mixture using electrophoresis has been achieved within the channels using applied voltages of up to 10 kV. The separation efficiency was in agreement with theory, indicating no interactions between the analyte and the glass walls. Solvent flow could be directed along a specified capillary by application of appropriate voltages, so that valveless switching of fluid flow between capillaries could be achieved.<>
Keywords
capillarity; chemical analysis; chemical sensors; electric sensing devices; electrophoresis; elemental semiconductors; glass; semiconductor technology; silicon; substrates; 10 kV; Si; capillary channels; chemical analysis; electrokinetic phenomenon; electrophoresis; feasibility; fluid flow; glass substrate; micromachining; planar substrate; sample separation; separation efficiency; solvent pumping; valveless switching; Chemical analysis; Chemistry; Electrokinetics; Fluid flow; Glass; Micromachining; Pumps; Silicon; Solvents; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest., IEEE
Conference_Location
Hilton Head Island, SC, USA
Print_ISBN
0-7803-0456-X
Type
conf
DOI
10.1109/SOLSEN.1992.228313
Filename
228313
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