Application of diamond-like carbon film for microdynamic devices

For microdynamic devices, static friction is one of the important characteristics. Studies on silicon electric micromotors indicate that friction in the bearings and at the bushings can dissipate a significant fraction of the micromotor motive torque. The coefficient of static friction is 0.2-0.7 between silicon and silicon-compound contacts measured in ultra high vacuum (UHV), and those values vary with exposure to the different gases. To find a low friction coating material for microdynamic devices, the authors studied diamond-like carbon (DLC) film under the same measurement conditions. The results indicate that DLC films show potential as a low wear, friction reducing coating for microdynamic devices.<>