مرکز منطقه ای اطلاع رساني علوم و فناوري - Ultra-thin Oxide With Atomically Smooth Interfaces

DocumentCode :

3265820

Title :

Ultra-thin Oxide With Atomically Smooth Interfaces

Author :

Chin, A. ; Chen, W.J. ; Kao, R.H. ; Lin, B.C. ; Chang, T. ; Tsai, C. ; Huang, J.C.-M.

fYear :

1997

fDate :

3-5 June 1997

Firstpage :

177

Lastpage :

181

Keywords :

Cleaning; Design for quality; Electric breakdown; Electron mobility; Furnaces; MOSFET circuits; Oxidation; Radio frequency; Scattering; Temperature;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

VLSI Technology, Systems, and Applications, 1997. Proceedings of Technical Papers. 1997 International Symposium on

Conference_Location :

Taipei, Taiwan

ISSN :

1524-766X

Print_ISBN :

0-7803-4131-7

Type :

conf

DOI :

10.1109/VTSA.1997.614753

Filename :

614753

Link To Document :