Title :
Polysilicon electrostatic comb MEMS actuator design and analysis
Author :
Liu Fengli ; Hao Yongping
Author_Institution :
R&D Center of CAD/CAM Technol., Shenyang Ligong Univ., Shenyang, China
Abstract :
The comb driver was designed and optimized to meet the requirement of enough displacement under lower drive voltage. Device displacement could reach 11um under 30V drive voltage. For comb drive is an inherently unstable system stability analysis about electrostatic spring softing ensure its system stiffness. The inclined comb finger is one main factor to cause its failure. The critical displacement of the comb finger was analyzed.
Keywords :
electrostatic actuators; comb driver; device displacement; drive voltage; electrostatic spring softing; inclined comb finger; inherently unstable system stability analysis; polysilicon electrostatic comb MEMS actuator; system stiffness; voltage 30 V; CADCAM; Computer aided manufacturing; Drives; Electrodes; Electrostatic actuators; Electrostatic analysis; Fingers; Micromechanical devices; Research and development; Resonant frequency;
Conference_Titel :
Microelectronics & Electronics, 2009. PrimeAsia 2009. Asia Pacific Conference on Postgraduate Research in
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-4668-1
Electronic_ISBN :
978-1-4244-4669-8
DOI :
10.1109/PRIMEASIA.2009.5397362
