Integrated circuit based biosensor technologies for DNA-microarray applications

The paper describes the development of a DNA-microarray using a standard integrated circuit (IC) fabrication process. Unlike conventional electronic systems, biochips have to handle molecular solutions that are uncommon in conventional IC technology. In addition, incompatibility between biological processing and electronic signal transduction requires special considerations to find detection protocols that are acceptable for both systems. The work presented utilizes a CMOS compatible process to fabricate a biochip for DNA identification in an array format. A self-assembled nano-metallic particles detection protocol is developed for direct conductivity measurements. The features provided by this technology include: (1) process compatibility with standard CMOS process; (2) highly selective immobilization of DNA probes in confined areas; (3) background signal reduction; (4) increased dynamic range by conductive enhancement.