DocumentCode :
3266862
Title :
Design and fabrication of a torsional z-axis capacitive accelerometer with novel comb capacitor
Author :
Yang, Zhenchuan ; Yan, Guizhen ; Hao, Yilong ; Wu, Guoying
Author_Institution :
Inst. of Microelectron., Peking Univ., Beijing, China
Volume :
3
fYear :
2004
fDate :
18-21 Oct. 2004
Firstpage :
1792
Abstract :
A novel comb capacitor, in which the fixed and movable fingers have different height at one side, is proposed. The comb capacitor can be used to measure torsional out-of-plane movement through a differential method. Using this kind of comb capacitor, a bulk micromachined torsional z-axis accelerometer is designed. The accelerometer is fabricated using a silicon/glass wafer bonding and deep reactive ion etching process, in which a composite etching mask technique is used to realize the novel comb structure.
Keywords :
accelerometers; capacitive sensors; masks; micromachining; microsensors; sputter etching; wafer bonding; bulk micromachined accelerometer; comb capacitor; composite etching mask technique; deep reactive ion etching process; differential measurement method; finger height; fixed capacitor fingers; movable fingers; silicon/glass wafer bonding; torsional out-of-plane movement; torsional z-axis capacitive accelerometer; Acceleration; Accelerometers; Biomedical measurements; Capacitance; Capacitors; Etching; Fabrication; Fingers; Glass; Wafer bonding;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
Print_ISBN :
0-7803-8511-X
Type :
conf
DOI :
10.1109/ICSICT.2004.1435181
Filename :
1435181
Link To Document :
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