Title :
Analysis of a MEMS gyroscope interface circuit
Author :
Wang Hulquan ; Zhonghe, Jin ; Jiwei, Jiao ; Yueling, Wang
Author_Institution :
Dept. Inf. & Electron. Eng, Zhejiang Univ., Hangzhou, China
Abstract :
The interface circuit of a MEMS gyroscope is analyzed in this paper. The gyro works at atmospheric pressure, driven by electronic magnetic force, and sensed by capacitance. The equivalent models of the gyro and the circuits are set. The performance of the gyro system is analyzed and optimized with the model. As a result, the system performance is significantly improved. The gyro´s resolution reaches 0.05 °/s, with full scale value 150 °/s, scale factor 9.8 mV/( °/s), nonlinearity 0.43%, and bias drift 3.06°/s /h.
Keywords :
gyroscopes; micromechanical devices; MEMS gyroscope; interface circuit; system performance; Atmospheric modeling; Capacitance; Circuits; Electrodes; Gyroscopes; Low pass filters; Magnetic analysis; Magnetic forces; Micromechanical devices; Power amplifiers;
Conference_Titel :
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
Print_ISBN :
0-7803-8511-X
DOI :
10.1109/ICSICT.2004.1435184
