A low noise CMOS instrumentation amplifier for integrated thermal gas flow sensor

Author

Cheng, Haiyang ; Qin, Ming ; Gao, Donghui ; Huang, Qing-An

Author_Institution

Key Lab. of MEMS of the Minist. of Educ., Southeast Univ., Nanjing, China

Volume

3

fYear

2004

fDate

18-21 Oct. 2004

Firstpage

1831

Abstract

A low noise CMOS instrumentation amplifier is realized to meet the requirements of an integrated thermal gas flow sensor for very weak and low frequency signal amplification. To avoid the offset and 1/f noise introduced by CMOS processes, a chopper stabilized technique is used to modulate the wanted signal to a higher frequency while keeping the distortion in the lower band. Simulation results have shown that the gain of the amplifier is about 500, and the equivalent input offset is no more than 1 μV and the equivalent input noise PSD is 36 nV/√(Hz). The sensor can measure wind speed of 0 to 23 m/s and is 360° sensitive.

Keywords

CMOS analogue integrated circuits; band-pass filters; choppers (circuits); flow measurement; instrumentation amplifiers; microsensors; 0 to 23 m/s; 1 muV; band pass filter; chopper stabilized technique; equivalent input noise PSD; equivalent input offset; integrated thermal gas flow sensor; low frequency signal amplification; low noise CMOS instrumentation amplifier; weak signal amplification; wind speed measurement; CMOS process; Choppers; Fluid flow; Frequency; Gas detectors; Instruments; Low-frequency noise; Low-noise amplifiers; Signal processing; Thermal sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on

Print_ISBN

0-7803-8511-X

Type

conf

DOI

10.1109/ICSICT.2004.1435191

Filename

1435191