Title :
A low cost monolithic accelerometer
Author :
Sherman, S.J. ; Tsang, W.K. ; Core, T.A. ; Quinn, D.E.
Author_Institution :
Analog Devices Semicond., Wilmington, MA, USA
Abstract :
The ADXL50, a complete scaled and temperature-compensated surface micromachined accelerometer with an output voltage proportional to acceleration with full-scale measurement range of +or-50 g and unpowered shock survival at 2000 g, is designed for crash detection in second-generation automotive air bag systems. A digitally activated self-test electrostatically deflects a functional beam so that a -50-g acceleration is indicated. An uncommitted amplifier, with rail-to-rail output range, allows rescaling and offsetting of the raw output signal. Capacitors can be introduced in the gain network surrounding the uncommitted amplifier so that two poles of low-pass filters are possible without the addition of off-chip active circuitry. Measured performance results for the ADXL50 are summarized.<>
Keywords :
accelerometers; automotive electronics; compensation; electric sensing devices; micromechanical devices; temperature control; ADXL50; BiCMOS interface; automotive air bag systems; crash detection; digitally activated self-test; gain network; low cost; low-pass filters; measurement range of +or-50 g; micromachined accelerometer; monolithic accelerometer; offsetting; rail-to-rail output range; rescaling; scaled accelerometer; shock survival; temperature-compensated; uncommitted amplifier; Acceleration; Accelerometers; Automotive engineering; Built-in self-test; Costs; Electric shock; Electrostatic measurements; Particle beams; Vehicle crash testing; Voltage;
Conference_Titel :
VLSI Circuits, 1992. Digest of Technical Papers., 1992 Symposium on
Conference_Location :
Seattle, WA, USA
Print_ISBN :
0-7803-0701-1
DOI :
10.1109/VLSIC.1992.229249
