DocumentCode
3267374
Title
Optimal and robust design of a MEMS gyroscope based on sensitivity analysis and worst-case tolerance
Author
Zhou, Hao ; Su, Wei ; Tang, Hai-Lin
Author_Institution
Inst. of Electron. Eng., China Acad. of Eng. Phys., Mianyang, China
fYear
2009
fDate
19-21 Jan. 2009
Firstpage
81
Lastpage
84
Abstract
This paper reports on an efficient robust optimal design of MEMS gyroscope. Proposed method uses sensitivity analysis considering the worst-case tolerance instead of statistical information about uncertainties. The robust optimal models based on macromodels consider electro-mechanical couple-field analysis. Monte Carlo analysis and physical level verification are also studied.
Keywords
Monte Carlo methods; gyroscopes; micromechanical devices; sensitivity analysis; MEMS gyroscope; Monte Carlo analysis; electro-mechanical couple-field analysis; physical level verification; sensitivity analysis; worst-case tolerance; Analytical models; Damping; Design engineering; Design optimization; Gyroscopes; Mechanical systems; Microelectromechanical devices; Micromechanical devices; Robustness; Sensitivity analysis;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics & Electronics, 2009. PrimeAsia 2009. Asia Pacific Conference on Postgraduate Research in
Conference_Location
Shanghai
Print_ISBN
978-1-4244-4668-1
Electronic_ISBN
978-1-4244-4669-8
Type
conf
DOI
10.1109/PRIMEASIA.2009.5397441
Filename
5397441
Link To Document