Construction of a low cost submicron measuring probe

The paper describes the construction of a low cost tabtile probe with optical displacement and angular sensors. The moving element of the probe consists of the stylus and a cross-form intermediate body suspended on berillium-copper foils springs. Small enhanced aluminium mirrors are placed at the two ends and at the center of th intermediate body. The displacement of the probe tip is calculated from the linear and angular displacement of the mirrors measured by modified optical pick-ups. The displacement is determined using the autofocus approach while the angular deflection is measured by a micro autocollimator.