Title :
A novel electro-thermal actuated micro position lock
Author :
Guo, Hui ; Zhang, Haixia
Author_Institution :
Inst. of Microelectron., Peking Univ., Beijing, China
Abstract :
This paper presents a novel electro-thermal actuated micro position lock. The device consumes power only during switching operation, and with no standby power consumption at all. This feature can reduce power consumption extremely and extend the device reliability. The device needs 5 V to drive, which is compatible with conventional CMOS logic. This kind of position lock could be used in controlling a micro-tube, which is an essential component in bio-MEMS chips and microfluidic chips.
Keywords :
microactuators; microfluidics; thermal expansion; 5 V; CMOS logic; MEMS actuators; bent-beam; bio-MEMS chips; cold/hot arm; device reliability; electro-thermal actuated lock; micro position lock; micro-tube control; microfluidic chips; switching operation power consumption; thermal actuator; thermal expansion; Electrostatic actuators; Energy consumption; Force measurement; Heating; Magnetic materials; Microelectronics; Micromechanical devices; Thermal expansion; Thermal force; Voltage;
Conference_Titel :
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
Print_ISBN :
0-7803-8511-X
DOI :
10.1109/ICSICT.2004.1435212
