DocumentCode
3267671
Title
A novel electro-thermal actuated micro position lock
Author
Guo, Hui ; Zhang, Haixia
Author_Institution
Inst. of Microelectron., Peking Univ., Beijing, China
Volume
3
fYear
2004
fDate
18-21 Oct. 2004
Firstpage
1915
Abstract
This paper presents a novel electro-thermal actuated micro position lock. The device consumes power only during switching operation, and with no standby power consumption at all. This feature can reduce power consumption extremely and extend the device reliability. The device needs 5 V to drive, which is compatible with conventional CMOS logic. This kind of position lock could be used in controlling a micro-tube, which is an essential component in bio-MEMS chips and microfluidic chips.
Keywords
microactuators; microfluidics; thermal expansion; 5 V; CMOS logic; MEMS actuators; bent-beam; bio-MEMS chips; cold/hot arm; device reliability; electro-thermal actuated lock; micro position lock; micro-tube control; microfluidic chips; switching operation power consumption; thermal actuator; thermal expansion; Electrostatic actuators; Energy consumption; Force measurement; Heating; Magnetic materials; Microelectronics; Micromechanical devices; Thermal expansion; Thermal force; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
Print_ISBN
0-7803-8511-X
Type
conf
DOI
10.1109/ICSICT.2004.1435212
Filename
1435212
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