Title :
Numerical analysis of pull-in voltage in contact MEMS switch with double actuated electrodes
Author :
Jiang, Ling ; Shi, Yanling ; Liu, Yun ; Ren, Zheng ; Ding, Yanfang ; Lai, Zongsheng ; Ziqiang Zhu
Author_Institution :
Dept. of Electron. Sci. & Technol., East China Normal Univ., Shanghai, China
Abstract :
This paper presents the numerical analysis of pull-in voltage for a contact MEMS switch with a couple of electrodes. The lumped-model for double actuated coupled parallel-plate actuators is applied to describe the pull-in phenomenon. And based on the pull-in analysis results, some optimizing approaches are developed to lower the pull-in voltage for a contact MEMS switch.
Keywords :
electrostatic actuators; microswitches; optimisation; RF MEMS; contact MEMS switch; double actuated electrodes; double coupled parallel-plate actuators; electrostatic actuators; lumped-model; switch pull-in voltage optimization; Bridge circuits; Contacts; Electrodes; Micromechanical devices; Microswitches; Numerical analysis; Phase shifters; Residual stresses; Switches; Voltage;
Conference_Titel :
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
Print_ISBN :
0-7803-8511-X
DOI :
10.1109/ICSICT.2004.1435213
