Title :
Predictive Simulation For Nanoscale Silicon Technology
Author :
Pinto, M. ; Alam, M. ; Bude, J. ; Vuong, Raffertym H -H
Keywords :
Computational modeling; Fasteners; Manufacturing processes; Physics computing; Predictive models; Research and development; Semiconductor device manufacture; Semiconductor process modeling; Silicon;
Conference_Titel :
VLSI Technology, Systems, and Applications, 1997. Proceedings of Technical Papers. 1997 International Symposium on
Print_ISBN :
0-7803-4131-7
DOI :
10.1109/VTSA.1997.614764
