Virtual Process: Concept, Problems and Implementation Framework

Taking the quantitative dynamic mechanical performance of MEMS device into acount, the accurate 3D geometric model of MEMS devices is very important. In this paper, the concept of virtual process was put forward; and each single process step is simulated by computer graphics at first; in this way, the whole process and typical shape changes are contained in virtual process. Next, the problems involved in realizing the virtual MEMS process are analyzed. Then, an implementation framework of virtual MEMS process based on expert system technology is given. Finally, an example of surface silicon process is realized, which verifies the feasibility of time and precision of implementation frame primarily.