Real-Time Voltage and Resistance Features in Microprobe Testing Process

A testing circuit of probe is designed to understand the real-time characteristics of the probe during testing process. The constant resistance voltage and probe voltage are measured simultaneously by DSOX2022A oscilloscope, and the real-time resistance of probe is calculated. The result shows that the probe resistance varies from the initial infinity to approximately $1~Omega $ at 0.2 ms when the probe is in contact with the copper substrate. The resistance of the probe is gradually reduced to relatively stable value with the increasing of compressed displacement. The probe resistance increases badly in initial 30 times testing when the angle between probe and copper changes from 0° to 2°, and reduces to a stable value after 20-30 times testing.