Title :
System identification of anti-vibration units in semiconductor exposure apparatus
Author :
Kato, H. ; Wakui, S. ; Mayama, T. ; Toukairin, A. ; Takanashi, H. ; Adachi, S.
Author_Institution :
Semicond. Production Equip. Dev. Center, Canon Inc., Tochigi, Japan
Abstract :
System identification of semiconductor exposure apparatus is discussed. It has a multi-degrees-of-freedom mechanism which includes anti-vibration units for microvibration control. A dynamical model of the mechanism is necessary in order to design the microvibration controller. The model is practically constructed in a short time using a subspace method. Identification results are evaluated through experimental data in comparison with a conventional frequency response method
Keywords :
MIMO systems; closed loop systems; damping; identification; lithography; microactuators; transfer function matrices; vibration control; anti-vibration units; conventional frequency response method; dynamical model; microvibration control; multi-degrees-of-freedom mechanism; semiconductor exposure apparatus; subspace method; system identification; Control systems; Frequency response; Lithography; MIMO; Open loop systems; Production equipment; Semiconductor device modeling; System identification; Time factors; Vibration control;
Conference_Titel :
Control Applications, 1999. Proceedings of the 1999 IEEE International Conference on
Conference_Location :
Kohala Coast, HI
Print_ISBN :
0-7803-5446-X
DOI :
10.1109/CCA.1999.801162
