Title :
Industrial growth of lithium tetraborate (Li2B4O7) piezocrystal and its SAW applications
Author :
Xu, Jiayue ; Lu, Baoliang ; Fan, Shiji
Author_Institution :
Shanghai Inst. of Ceramics, Chinese Acad. of Sci., Shanghai, China
Abstract :
Lithium tetraborate Li2B4O7 (LBO) single crystal is a superior substrate material for surface acoustic wave and bulk acoustic wave devices due to its fairly high electromechanical coupling factor and zero temperature coefficient of frequency in [110] plane. In this paper, Bridgman growth of large size LBO crystals is presented from an industrial point of view. The improvements and advantages of the modified Bridgman method are discussed. Mass production of Φ3 4 LBO boules has been realized in our laboratory. The fabrication of SAW devices based on LBO wafers is introduced briefly.
Keywords :
bulk acoustic wave devices; crystal growth from melt; lithium compounds; piezoelectric devices; substrates; surface acoustic wave devices; Bridgman growth; LBO single crystal; Li2B4O7; SAW devices; bulk acoustic wave devices; electromechanical coupling factor; lithium tetraborate piezocrystal; substrate material; surface acoustic wave; zero temperature coefficient; Acoustic materials; Acoustic waves; Bulk acoustic wave devices; Crystalline materials; Crystals; Frequency; Lithium; Mass production; Surface acoustic wave devices; Temperature;
Conference_Titel :
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
Print_ISBN :
0-7803-8511-X
DOI :
10.1109/ICSICT.2004.1435280
