Advanced technology development at SEMATECH

The development of advanced technology is significantly impacted by the cost and complexity of bringing it from research to manufacturing. SEMATECH, a global consortium of major semiconductor manufacturers, has evolved over the last two decades to address this and other challenges of the chip industry. In doing so, we have become deeply attuned to the necessity of honing our R&D activities in ways that reduce time to market, and time to money. Our R&D activities include: lithography, which concentrates on extreme ultraviolet (EUV) and 193 nm immersion technologies, as well as development of advanced resists and affordable masks; front end processes, which focuses on CMOS scaling, including high-k and metal electrode materials and channel engineering; interconnect, where our primary focus is resistance-capacitance (RC) delay. We also maintain two major university-based programs in our efforts to develop advanced technology.