DocumentCode :
3269744
Title :
Newly developed RELACS process and materials for 65nm node device and beyond
Author :
Terai, M. ; Kumada, Tatsuya ; Ishibashi, Takeo ; Hanawa, Tetsuro
Author_Institution :
Mitsubishi Electr. Corp, Hyogo, Japan
fYear :
2005
fDate :
25-28 Oct. 2005
Firstpage :
20
Lastpage :
21
Abstract :
To meet market´s demands for high performance devices, we have studied various resolution enhancement techniques (RET), such as off axis illumination, phase shift masks, optical proximity correction, resist thermal reflow, and chemical shrinkage process etc. RELACS (resolution enhancement lithography assisted by chemical shrink) is one of the most useful technology among chemical shrink processes. We have introduced KrF-RELACS process into mass production phase. However, in the case of ArF lithography, we are not able to be satisfied with shrinkage performance of conventional RELACS materials. To improve this matter, we paid attention to the chemically difference of side chain between KrF resist and ArF resist polymers.
Keywords :
argon compounds; krypton compounds; nanolithography; phase shifting masks; proximity effect (lithography); ultraviolet lithography; 65 nm; ArF; ArF lithography; ArF resist polymers; KrF; KrF resist polymers; KrF-RELACS process; RELACS materials; RELACS process; chemical shrink process; mass production phase; resolution enhancement lithography; Chemical processes; Chemical technology; Lighting; Lithography; Mass production; Optical devices; Optical materials; Polymers; Resists; Thermal resistance;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2005 International
Print_ISBN :
4-9902472-2-1
Type :
conf
DOI :
10.1109/IMNC.2005.203717
Filename :
1595193
Link To Document :
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