Title :
Nano-structured surface fabrication for higher luminescent LED by self-assembled block copolymer
Author :
Fujimoto, Akira ; Asakawa, Koji
Author_Institution :
Corporate R&D Center, Toshiba Corp., Kawasaki, Japan
Abstract :
Nano-patterned structures were fabricated by a self-assembled block copolymer process. The nano-patterned structure on GaP with a diameter of 100 nm, a period of 150-200 nm, and a height of 400 nm was fabricated. The extraction efficiency of the fabricated surface on the GaP was increased 2.6 times compared with that of the flat surface. The luminance of the LED tip having the patterned structure increased 1.5 times compared with that of the conventional LED tip.
Keywords :
III-V semiconductors; aluminium compounds; gallium arsenide; gallium compounds; light emitting diodes; luminescence; nanopatterning; polymer blends; self-assembly; 100 nm; 150 to 200 nm; 400 nm; GaAs-AlGaAs; GaP; LED tip luminance; nano-patterned structures; nano-structured surface fabrication; self assembled block copolymer process; Annealing; Color; Dry etching; Fabrication; Light emitting diodes; Nanostructures; Photonic crystals; Plasma applications; Self-assembly; Substrates;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2005 International
Print_ISBN :
4-9902472-2-1
DOI :
10.1109/IMNC.2005.203745
