Title :
Soft X-ray emission and absorption spectra of DLC film formed by FIB-CVD method
Author :
Saikubo, Akihiko ; Igaki, Jun-ya ; Kato, Yuri ; Kometani, Reo ; Kanda, Kazuhiro ; Matsui, Shinji
Author_Institution :
Graduate Sch. of Sci., Hyogo Univ., Japan
Abstract :
It is known that focused ion beam chemical vapor deposition (FIB-CVD) is useful to form 3D nano-structures. In this method, carbon based material was formed by gallium focused ion beam assisted deposition using phenanthrene as a carbon source. In the previous study, carbon thin film formed by FIB-CVD was considered to be diamond like carbon (DLC), however, the structural properties based on electronic states have not been sufficiently understood. In the present study, we investigate the electronic states of carbon thin film formed by FIB-CVD method by the measurement of near edge X-ray absorption fine structure (NEXAS) of the carbon K edge using synchrotron radiation. In addition, soft X-ray emission spectrum was observed with an electron probe microanalyzer (EPMA).
Keywords :
CVD coatings; EXAFS; X-ray emission spectra; diamond-like carbon; electron probe analysis; focused ion beam technology; synchrotron radiation; thin films; FIB-CVD method; carbon K edge; carbon thin films; chemical vapor deposition; diamond like carbon films; electron probe microanalyzer; electronic states; focused ion beam technology; near edge x-ray absorption fine structure; soft X-ray absorption spectra; soft X-ray emission spectra; synchrotron radiation; Carbon dioxide; Chemical vapor deposition; Diamond-like carbon; Electromagnetic wave absorption; Electron emission; Ion beams; Organic materials; Probes; Synchrotron radiation; Transistors;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2005 International
Print_ISBN :
4-9902472-2-1
DOI :
10.1109/IMNC.2005.203756
