Soft X-ray emission and absorption spectra of DLC film formed by FIB-CVD method

Author

Saikubo, Akihiko ; Igaki, Jun-ya ; Kato, Yuri ; Kometani, Reo ; Kanda, Kazuhiro ; Matsui, Shinji

Author_Institution

Graduate Sch. of Sci., Hyogo Univ., Japan

fYear

2005

fDate

25-28 Oct. 2005

Firstpage

98

Lastpage

99

Abstract

It is known that focused ion beam chemical vapor deposition (FIB-CVD) is useful to form 3D nano-structures. In this method, carbon based material was formed by gallium focused ion beam assisted deposition using phenanthrene as a carbon source. In the previous study, carbon thin film formed by FIB-CVD was considered to be diamond like carbon (DLC), however, the structural properties based on electronic states have not been sufficiently understood. In the present study, we investigate the electronic states of carbon thin film formed by FIB-CVD method by the measurement of near edge X-ray absorption fine structure (NEXAS) of the carbon K edge using synchrotron radiation. In addition, soft X-ray emission spectrum was observed with an electron probe microanalyzer (EPMA).

Keywords

CVD coatings; EXAFS; X-ray emission spectra; diamond-like carbon; electron probe analysis; focused ion beam technology; synchrotron radiation; thin films; FIB-CVD method; carbon K edge; carbon thin films; chemical vapor deposition; diamond like carbon films; electron probe microanalyzer; electronic states; focused ion beam technology; near edge x-ray absorption fine structure; soft X-ray absorption spectra; soft X-ray emission spectra; synchrotron radiation; Carbon dioxide; Chemical vapor deposition; Diamond-like carbon; Electromagnetic wave absorption; Electron emission; Ion beams; Organic materials; Probes; Synchrotron radiation; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 2005 International

Print_ISBN

4-9902472-2-1

Type

conf

DOI

10.1109/IMNC.2005.203756

Filename

1595232