DocumentCode
3270477
Title
A simulation of backscattered electron microtomography in scanning electron microscope
Author
Suzuki, Yusuke ; Yasuda, Masaaki ; Kawata, Hiroaki ; Hirai, Yoshihiko
Author_Institution
Dept. of Phys. & Electron., Osaka Prefecture Univ., Japan
fYear
2005
fDate
25-28 Oct. 2005
Firstpage
100
Lastpage
101
Abstract
In this paper, we attempt to reconstruct the tomographic image from the energy-filtered BSE signals calculated with a Monte Carlo simulation of electron scattering. We discuss the characteristics of the images for several types of sampled structures.
Keywords
Monte Carlo methods; electron backscattering; optical tomography; scanning electron microscopes; BSE signals; Monte Carlo simulation; backscattered electron microtomography; electron scattering; scanning electron microscope; tomographic image reconstruction; Biomedical signal processing; Electronics industry; Image reconstruction; Inspection; Physics; Scanning electron microscopy; Scattering; Signal processing; Tomography; Transmission electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2005 International
Print_ISBN
4-9902472-2-1
Type
conf
DOI
10.1109/IMNC.2005.203757
Filename
1595233
Link To Document