DocumentCode :
3270990
Title :
Dynamic growth process of W-nano-branched structure on insulator substrate studied with transmission electron microscopy
Author :
Song, M. ; Mitsuishi, K. ; Furuya, K.
Author_Institution :
National Inst. for Mater. Sci., Tsukuba, Japan
fYear :
2005
fDate :
25-28 Oct. 2005
Firstpage :
156
Abstract :
Controllable fabrication of nanostructure is important and necessary to application of nanomaterials in technology. Among the methods of fabrication of nanostructures, electron-beam-induced deposition (EBID) is a promising method. A transmission electron microscope (TEM), JEM-2010F operated at 200 kV, was used for fabrication of nanowires and nano-branched structures. Thin film samples Of SiO2 or Al2O3 were used as substrates. Tungsten hexacarbonyl (W(CO)6) powder was used as a precursor. The base pressure in column is lower than 2 × 10-5 Pa. A gas introducing system which has a nozzle with an inner diameter smaller than 0. 1 mm and a reservoir of powder gas-source was used. The fabricated structures were characterized in-situ or after the fabrication with JEM-2010F TEM. All the experiments were performed at room temperature. Nanowires in diameter of about 3 nm nucleate on surface of substrate after starting the electron irradiation with intensity lower than 0.75 A/cm2. They nucleate and grow within the all area electron beam irradiated. They grow almost normally to the surface of the substrate with distances of several nanometers between each other.
Keywords :
aluminium compounds; electron beam deposition; nanostructured materials; nanotechnology; nanowires; silicon compounds; substrates; transmission electron microscopy; Al2O3; SiO2; W-nanobranched structure; dynamic growth process; electron-beam-induced deposition; insulator substrate; nanostructures; nanowires; transmission electron microscopy; Fabrication; Insulation; Nanomaterials; Nanostructures; Nanowires; Powders; Substrates; Transistors; Transmission electron microscopy; Tungsten;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2005 International
Print_ISBN :
4-9902472-2-1
Type :
conf
DOI :
10.1109/IMNC.2005.203785
Filename :
1595261
Link To Document :
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