• DocumentCode
    3271043
  • Title

    Structure analysis of self-assembled ErSi2 nanowires formed on Si substrates

  • Author

    Watanabe, Ryouki ; Kuzuu, T. ; Kohno, Kazuki ; Harako, S. ; Kobayashi, Tomohiro ; Meguro, Takashi ; Zhao, Xinwei

  • Author_Institution
    Dept. of Phys., Tokyo Univ. of Sci., Japan
  • fYear
    2005
  • fDate
    25-28 Oct. 2005
  • Firstpage
    162
  • Lastpage
    163
  • Abstract
    The synthesis of rare-earth silicide nano-structures on Si substrate has been an interesting topic because of their potential in forming low-dimensional devices. In this paper, self-assembled growth has been used to form wire-like structures based on the lattice mismatch between the wires and the semiconductor substrates.
  • Keywords
    elemental semiconductors; erbium compounds; nanowires; self-assembly; semiconductor growth; silicon; ErSi2; lattice mismatch; nanowires; rare-earth silicide nanostructures; self-assembled growth; semiconductor substrates; structure analysis; wire-like structure; Annealing; Chemical analysis; Epitaxial growth; Erbium; Nanowires; Self-assembly; Substrates; Surface morphology; Wires; X-ray scattering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2005 International
  • Print_ISBN
    4-9902472-2-1
  • Type

    conf

  • DOI
    10.1109/IMNC.2005.203788
  • Filename
    1595264
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3271043