Title :
Structure analysis of self-assembled ErSi2 nanowires formed on Si substrates
Author :
Watanabe, Ryouki ; Kuzuu, T. ; Kohno, Kazuki ; Harako, S. ; Kobayashi, Tomohiro ; Meguro, Takashi ; Zhao, Xinwei
Author_Institution :
Dept. of Phys., Tokyo Univ. of Sci., Japan
Abstract :
The synthesis of rare-earth silicide nano-structures on Si substrate has been an interesting topic because of their potential in forming low-dimensional devices. In this paper, self-assembled growth has been used to form wire-like structures based on the lattice mismatch between the wires and the semiconductor substrates.
Keywords :
elemental semiconductors; erbium compounds; nanowires; self-assembly; semiconductor growth; silicon; ErSi2; lattice mismatch; nanowires; rare-earth silicide nanostructures; self-assembled growth; semiconductor substrates; structure analysis; wire-like structure; Annealing; Chemical analysis; Epitaxial growth; Erbium; Nanowires; Self-assembly; Substrates; Surface morphology; Wires; X-ray scattering;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2005 International
Print_ISBN :
4-9902472-2-1
DOI :
10.1109/IMNC.2005.203788
