Surface modification of DLC films by synchrotron radiation exposure under the perfluorohexane gas atmosphere

Diamond-like carbon (DLC) is used as a superior material in various fields, because of its several excellent properties, such as high hardness, low friction coefficient and so on. Surface modification of DLC films with fluorine containing group have been explored, because flourine functional groups on the surface have unique properties such as hydrophobic and bioactive. In this study, we investigated the surface modification of diamond-like carbon (DLC) films by synchrotron radiation (SR) under the perfluorohexane (C₆F₁₄) gas atmosphere.