DocumentCode :
3271153
Title :
Electrical properties of multi-walled carbon nanotubes prepared by MPCVD
Author :
Ting, Jyh-Hua ; Liu, Zhan-Liang ; Hsu, Cho-Lun ; Huang, Fuang-Yuan
Author_Institution :
Nat. Nano Device Labs., Hsinchu, Taiwan
fYear :
2005
fDate :
25-28 Oct. 2005
Firstpage :
174
Lastpage :
175
Abstract :
It is the purpose of this study to investigate the electrical properties of carbon nanotubes (CNTs) in vias prepared by microwave plasma-enhanced chemical vapor deposition (MPCVD) method.
Keywords :
carbon nanotubes; electric properties; plasma CVD coatings; electrical properties; microwave plasma-enhanced chemical vapor deposition; multiwalled carbon nanotubes; Carbon nanotubes; Contact resistance; Diodes; Electric resistance; Hydrogen; Nickel; Plasma devices; Plasma properties; Plasma temperature; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2005 International
Print_ISBN :
4-9902472-2-1
Type :
conf
DOI :
10.1109/IMNC.2005.203794
Filename :
1595270
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3271153
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