Title :
2D magnetic microsensor with on-chip signal processing for contactless angle measurement
Author :
Haberli, A. ; Schneider, M. ; Malcovati, P. ; Castagnetti, R. ; Maloberti, F. ; Baltes, H.
Author_Institution :
Lab. of Phys. Electron., Eidgenossische Tech. Hochschule, Zurich, Switzerland
Abstract :
This microsystem is the key element for accurate contactless angle measurements in combination with a permanent magnet. The system is based on a novel approach for signal processing using an on-board incremental ADC and a two-dimensional (2D) magnetic microsensor allowing 1/spl deg/ resolution. The system can be used for various wear-free angular positioning control systems in industrial and automotive applications.
Keywords :
analogue-digital conversion; angular measurement; magnetic sensors; microsensors; spatial variables measurement; 2D magnetic microsensor; automotive applications; contactless angle measurement; industrial applications; on-board incremental ADC; on-chip signal processing; permanent magnet; wear-free angular positioning control systems; Circuits; Goniometers; Magnetic field measurement; Magnetic sensors; Micromagnetics; Permanent magnets; Sensor systems; Signal processing; Signal resolution; Temperature sensors;
Conference_Titel :
Solid-State Circuits Conference, 1996. Digest of Technical Papers. 42nd ISSCC., 1996 IEEE International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-3136-2
DOI :
10.1109/ISSCC.1996.488641
