DocumentCode
3271520
Title
Fabrication of a three-dimensional multichamber using polymer bonding and MEMS technology
Author
Eun, Duk-Soo ; Park, Hyung-Jin ; Kong, Dae-Young ; Kong, Seong-Ho ; Choi, Pyung ; Shin, Jang-Kyoo ; Lee, Jong-Hyun
Author_Institution
Sch. of Electron. & Electr. Eng., Kyungpook Nat. Univ., Daegu, South Korea
fYear
2005
fDate
25-28 Oct. 2005
Firstpage
214
Lastpage
215
Abstract
In this paper, we propose an advanced design for a multichamber type PCR reactor array by which continuous amplification and the cultivation of various samples are possible. The newly designed PCR reactor array consists of three bonded wafers, and a middle silicon/glass wafer sandwiched between the top and bottom glass wafers. In particular, the middle silicon/glass wafer was produced in order to maintain thermal equilibrium effectively by using polymer bonding technology and MEMS technology.
Keywords
adhesive bonding; biological techniques; microsensors; 3D multichamber; MEMS technology; PCR reactor array; polymer bonding; thermal equilibrium; Bonding; Chemical elements; Fabrication; Glass; Heating; Inductors; Micromechanical devices; Polymers; Silicon; Thermal sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2005 International
Print_ISBN
4-9902472-2-1
Type
conf
DOI
10.1109/IMNC.2005.203814
Filename
1595290
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