Title :
Design and fabrication of a MEMS-based electrolytic tilt sensor
Author :
Kang, Ik-Su ; Jung, Ho ; Kim, Dong-Sun ; Kwon, Byong-Jo ; Kim, Chang Jin ; Kim, Woo-Jeong ; Choi, Sie-Young ; Lee, Jong-Hyun ; Shin, Jang-Kyoo ; Kong, Seong Ho
Author_Institution :
Sch. of Electron. & Electr. Eng., Kyungpook Nat. Univ., Daegu, South Korea
Abstract :
Tilt sensors are applied in a wide range of applications: antenna positioning, avionics, slope or tilt monitoring, vehicle attitude monitoring and so on. It is known the electrolytic type is one of the most enduring tilt sensors to date. This paper reports designing and fabrication of a MEMS-based electrolytic tilt sensor.
Keywords :
electrolytic devices; microsensors; MEMS; electrolytic tilt sensor; Aerospace electronics; Bonding; Electrodes; Etching; Fabrication; Gas detectors; Glass; Gold; Monitoring; Surface resistance;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2005 International
Print_ISBN :
4-9902472-2-1
DOI :
10.1109/IMNC.2005.203815
