DocumentCode :
3271579
Title :
Electromagnetic induction phenomena of nano-coil fabricated by FIB-CVD
Author :
Ozasa, Akinori ; Nakamatsu, Kazumi ; Kometani, R. ; Hoshino, Takayuki ; Kanda, Kazuhiro ; Haruyama, Yu-ichi ; Fujita, Jun-ichi ; Kaito, Takashi ; Matsui, Shinji
Author_Institution :
Graduate Sch. of Sci. LASTI, Hyogo Univ., Japan
fYear :
2005
fDate :
25-28 Oct. 2005
Firstpage :
222
Lastpage :
223
Abstract :
In this paper, we have demonstrated the observation of electromagnetic induction between two coils. Two nano-coils were fabricated extremely close to each other on electrodes by FIB-CVD. The SEM image of two nano-coils fabricated by FIB-CVD is shown. Phenanthrene (C14H10) source gas was used to make DLC coils.
Keywords :
chemical vapour deposition; coils; diamond-like carbon; electromagnetic induction; focused ion beam technology; nanowires; scanning electron microscopy; DLC coils; FIB-CVD; SEM; electrodes; electromagnetic induction phenomena; nano-coil fabricated; phenanthrene; Coils; Current measurement; Electrodes; Electromagnetic induction; Electromagnetic measurements; Electromagnets; Magnetic devices; Nanoscale devices; Nanotechnology; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2005 International
Print_ISBN :
4-9902472-2-1
Type :
conf
DOI :
10.1109/IMNC.2005.203818
Filename :
1595294
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3271579
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