• DocumentCode
    3271580
  • Title

    A new approach to making thin film head/slider devices

  • Author

    Chapman, D.W.

  • Author_Institution
    IBM Corporation
  • fYear
    1989
  • fDate
    28-31 March 1989
  • Keywords
    Magnetic films; Magnetic heads; Magnetic recording; Rails; Sputter etching; Substrates; Thin film devices; Transistors; Wafer bonding; Wet etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Magnetics Conference, 1989. Digests of INTERMAG '89., International
  • Conference_Location
    Washington, DC, USA
  • Type

    conf

  • DOI
    10.1109/INTMAG.1989.690128
  • Filename
    690128
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3271580