Comparison of Young´s modulus dependency on beam accelerating voltage between EB- and FIB-CVD pillars

Author

Okada, Satoshi ; Mukawa, Takahito ; Kobayashi, Ryota ; Ishida, Masahiko ; Ochiai, Yukinori ; Kaito, Takashi ; Matsui, Shinji ; Fujita, Jun-ichi

Author_Institution

CREST JST, Japan Sci. & Technol. Co., Saitama, Japan

fYear

2005

fDate

25-28 Oct. 2005

Firstpage

234

Lastpage

235

Abstract

In this paper, we report our findings that Young´s modulus of amorphous carbon nanopillars grown by FIB-CVD decreases with a decreasing ion-beam accelerating voltage, while that of those grown by EB-CVD increases.

Keywords

Young´s modulus; chemical vapour deposition; electron beam deposition; focused ion beam technology; nanostructured materials; EB-CVD pillars; FIB-CVD pillars; Young´s modulus; amorphous carbon nanopillars; ion-beam accelerating voltage; Acceleration; Amorphous materials; Chemical technology; Electrons; Nanostructures; Particle beams; Physics; Structural beams; Vibration measurement; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 2005 International

Print_ISBN

4-9902472-2-1

Type

conf

DOI

10.1109/IMNC.2005.203824

Filename

1595300

Link To Document

https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3271677