Title :
Comparison of Young´s modulus dependency on beam accelerating voltage between EB- and FIB-CVD pillars
Author :
Okada, Satoshi ; Mukawa, Takahito ; Kobayashi, Ryota ; Ishida, Masahiko ; Ochiai, Yukinori ; Kaito, Takashi ; Matsui, Shinji ; Fujita, Jun-ichi
Author_Institution :
CREST JST, Japan Sci. & Technol. Co., Saitama, Japan
Abstract :
In this paper, we report our findings that Young´s modulus of amorphous carbon nanopillars grown by FIB-CVD decreases with a decreasing ion-beam accelerating voltage, while that of those grown by EB-CVD increases.
Keywords :
Young´s modulus; chemical vapour deposition; electron beam deposition; focused ion beam technology; nanostructured materials; EB-CVD pillars; FIB-CVD pillars; Young´s modulus; amorphous carbon nanopillars; ion-beam accelerating voltage; Acceleration; Amorphous materials; Chemical technology; Electrons; Nanostructures; Particle beams; Physics; Structural beams; Vibration measurement; Voltage;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2005 International
Print_ISBN :
4-9902472-2-1
DOI :
10.1109/IMNC.2005.203824
