Title :
RF Integrated Planar Inductor Fabricated on Ferrite Substrates
Author :
Liu, B.Y. ; Zhang, H.W. ; Tang, X.L. ; Su, H.
Author_Institution :
Sch. of Micro-Electron. & Solid-state Electron., Univ. of Electron. Sci. & Technol., Chengdu
Abstract :
A high frequency planar inductor fabricated directly on ferrite substrate is proposed in this paper. The NiCuZu ferrite was selected as the substrate. Due to NiCuZn´s high resistivity, no insulator is required. So, it is an advantage in terms of ease fabricated and stray capacitance reduction. Sandwiched inductors show improvement of inductance from 16nH to 80nH at 1MHz compare with the coreless inductors, and the increment of inductance is larger than the magnetic thin-film inductor.
Keywords :
copper alloys; ferrite devices; ferrites; nickel alloys; thin film inductors; zinc alloys; NiCuZn; RF integrated planar inductor; coreless inductors; ferrite substrates; frequency 1 MHz; magnetic thin-film inductor; sandwiched inductors; stray capacitance reduction; Capacitance; Conductivity; Ferrites; Inductance; Insulation; Magnetic cores; Magnetic films; Radio frequency; Substrates; Thin film inductors;
Conference_Titel :
Communications, Circuits and Systems Proceedings, 2006 International Conference on
Conference_Location :
Guilin
Print_ISBN :
0-7803-9584-0
Electronic_ISBN :
0-7803-9585-9
DOI :
10.1109/ICCCAS.2006.285210
