Title :
Dynamic analysis of Nano-precision stage with aerostatic bearing
Author :
Tian, Cai ; Ming, Zhang ; Yu, Zhu ; Jing, Wang
Author_Institution :
Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing, China
Abstract :
The dynamic performance of a Nano-precision stage equipped with aerostatic bearing was studied. A dynamic modeling method for the stage was presented. In the method, general equation of dynamics with virtual power form and analysis of rigid body finite rotation were used to analyze the dynamic characteristic of stage and the influence of aerostatic bearing when positioning, and the motion differential equations which could be use for controller design and optimization were obtained. The vibration characteristic of the stage was analyzed based on the motion differential equations and the natural frequency caused by air bearing was calculated. A model test experiment was carried out and the experiment results showed the validity of the method.
Keywords :
control system synthesis; differential equations; machine bearings; precision engineering; vibrations; aerostatic bearing; air bearing; controller design; dynamic equation; dynamic modeling method; motion differential equations; nanoprecision stage; rigid body finite rotation; vibration characteristic; virtual power form; Aerodynamics; Atmospheric modeling; Differential equations; Mathematical model; Optimization; Three dimensional displays; Nano-precision stage; aerostatic bearing; dynamic analysis; model test;
Conference_Titel :
Electric Information and Control Engineering (ICEICE), 2011 International Conference on
Conference_Location :
Wuhan
Print_ISBN :
978-1-4244-8036-4
DOI :
10.1109/ICEICE.2011.5777319
