Title :
Integration of terahertz quantum cascade lasers with lithographically micromachined waveguides
Author :
Wanke, Michael C. ; Nordquist, Christopher ; Arrington, Christian L. ; Rowen, Adam M. ; Grine, Albert D. ; Shaner, Eric A. ; Lee, Mark
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM
Abstract :
Gold rectangular waveguides suitable for single mode operation at frequencies near 3 THz have been micromachined using silicon microfabrication methods. The design, fabrication, and loss characteristics of these waveguides will be presented. On-chip integration of these waveguide structures with THz quantum cascade laser (QCL) sources has been achieved and the characteristics of QCL beams guided by waveguide will be discussed.
Keywords :
elemental semiconductors; integrated optics; micro-optomechanical devices; micromachining; optical design techniques; optical fabrication; optical losses; optical waveguides; quantum cascade lasers; silicon; submillimetre wave lasers; Si; gold rectangular waveguides; lithographically micromachined waveguides; on-chip integration; silicon microfabrication methods; terahertz quantum cascade lasers; Design methodology; Frequency; Laboratories; Laser beams; Optical device fabrication; Quantum cascade lasers; Rectangular waveguides; Shape measurement; Silicon; Solid state circuits;
Conference_Titel :
Infrared, Millimeter and Terahertz Waves, 2008. IRMMW-THz 2008. 33rd International Conference on
Conference_Location :
Pasadena, CA
Print_ISBN :
978-1-4244-2119-0
Electronic_ISBN :
978-1-4244-2120-6
DOI :
10.1109/ICIMW.2008.4665539
