Title :
Research of material transfer software platform in IC equipment controlling system
Author :
Yanan Wang ; Mingzhe Liu ; Yuanfeng Liu
Author_Institution :
Shenyang Inst. of Autom., Shenyang, China
Abstract :
This paper researches and develops a material transfer software platform using in the semiconductor equipment controlling system, this platform is developed by offering unified interfaces and developing independent software modules according to the common demand of the manufactures, and is applied in an experimental platform, the result shows that the platform software can effectively improve user´s development efficiency, and has good application prospects.
Keywords :
control engineering computing; production control; production engineering computing; production equipment; semiconductor device manufacture; software engineering; IC equipment controlling system; independent software module development; material transfer software platform; semiconductor equipment controlling system; semiconductor equipment manufacturing; unified interfaces; user development efficiency improvement; Chaotic communication; Educational institutions; XML; material transfer; rapid development; semiconductor equipment control system; versatility;
Conference_Titel :
Software Engineering and Service Science (ICSESS), 2013 4th IEEE International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4673-4997-0
DOI :
10.1109/ICSESS.2013.6615296
