• DocumentCode
    3276885
  • Title

    An Efficient Loop Detection and Removal Algorithm for 3D Surface-Based Lithography Simulation

  • Author

    Helmsen, John J. ; Scheckler, Edward W. ; Neureuther, Andrew R. ; Séquin, Carlo H.

  • Author_Institution
    University of California, Berkeley
  • fYear
    1992
  • fDate
    31 May-1 Jun 1992
  • Firstpage
    3
  • Lastpage
    8
  • Keywords
    Circuit simulation; Circuit testing; Data structures; Educational institutions; Fabrication; Integrated circuit testing; Laboratories; Lithography; Surface topography; Three-dimensional integrated circuits;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Numerical Modeling of Processes and Devices for Integrated Circuits, 1992. NUPAD IV. Workshop on
  • Print_ISBN
    0-7803-0516-7
  • Type

    conf

  • DOI
    10.1109/NUPAD.1992.673838
  • Filename
    673838
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3276885