Title :
Coupling Models and Algorithms for 3D Topography Simulation: Plasma Etching, lon Milling and Deposition in SAMPLE-3D
Author :
Scheckler, Edward W. ; Neureuther, Andrew R.
Author_Institution :
University of California, Berkeley
fDate :
31 May-1 Jun 1992
Keywords :
Convolution; Data structures; Etching; Laboratories; Milling; Plasma applications; Plasma materials processing; Plasma simulation; Software algorithms; Surface topography;
Conference_Titel :
Numerical Modeling of Processes and Devices for Integrated Circuits, 1992. NUPAD IV. Workshop on
Print_ISBN :
0-7803-0516-7
DOI :
10.1109/NUPAD.1992.673839
