DocumentCode
3277061
Title
Coupling Models and Algorithms for 3D Topography Simulation: Plasma Etching, lon Milling and Deposition in SAMPLE-3D
Author
Scheckler, Edward W. ; Neureuther, Andrew R.
Author_Institution
University of California, Berkeley
fYear
1992
fDate
31 May-1 Jun 1992
Firstpage
9
Lastpage
14
Keywords
Convolution; Data structures; Etching; Laboratories; Milling; Plasma applications; Plasma materials processing; Plasma simulation; Software algorithms; Surface topography;
fLanguage
English
Publisher
ieee
Conference_Titel
Numerical Modeling of Processes and Devices for Integrated Circuits, 1992. NUPAD IV. Workshop on
Print_ISBN
0-7803-0516-7
Type
conf
DOI
10.1109/NUPAD.1992.673839
Filename
673839
Link To Document