• DocumentCode
    3277235
  • Title

    3d-numerical Model Of BPSG Reflow Using Surface Diffusion

  • Author

    Fujinaga, M.

  • Author_Institution
    Mitsubishi Electric Corporation
  • fYear
    1992
  • fDate
    31 May-1 Jun 1992
  • Firstpage
    15
  • Lastpage
    20
  • Keywords
    Algorithm design and analysis; Chemicals; Circuit simulation; Glass; Laboratories; Large scale integration; Numerical models; Semiconductor device modeling; Surface tension; Surface topography;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Numerical Modeling of Processes and Devices for Integrated Circuits, 1992. NUPAD IV. Workshop on
  • Print_ISBN
    0-7803-0516-7
  • Type

    conf

  • DOI
    10.1109/NUPAD.1992.673840
  • Filename
    673840
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3277235