DocumentCode

3277458

Title

A robust Numerical Procedure for Stress Dependent 2DOxidation Simulation

Author

Collard, D. ; Baccus, B. ; Hamonic, B.

Author_Institution

ISEN / IEMN

fYear

1992

fDate

31 May-1 Jun 1992

Firstpage

21

Lastpage

26

Keywords

Convergence of numerical methods; Oxidation; Plastics; Predictive models; Robustness; Shape; Silicon; Stability; Thermal stresses; Topology;

fLanguage

English

Publisher

ieee

Conference_Titel

Numerical Modeling of Processes and Devices for Integrated Circuits, 1992. NUPAD IV. Workshop on

Print_ISBN

0-7803-0516-7

Type

conf

DOI

10.1109/NUPAD.1992.673841

Filename

673841