• DocumentCode
    3277500
  • Title

    Integrated thin film heater and sensor with planar lightwave circuits

  • Author

    Yan, Ming ; Weaver, Jason ; Ho, Calvin ; Hao, Xu ; Tarter, Thomas

  • Author_Institution
    NeoPhotonics Corp, San Jose, CA, USA
  • fYear
    2004
  • fDate
    9-11 Mar 2004
  • Firstpage
    184
  • Lastpage
    189
  • Abstract
    This paper describes the use of integrated heaters and closed-loop applications for temperature control of planar waveguide circuits. The history of AWG temperature control is discussed along with the difficulties in applying this control. Modeling and measurement results for external and integrated heaters will be presented. Fundamental considerations as well as modeling and measurement of the thermal characteristics of various physical constructions are discussed, and the rationale for applying these disciplines to a given problem is highlighted. In this work, we will present the evolution of these unique integrated thin film heaters and review thermal-optical modeling to experimental demonstration of arrayed waveguide gratings (AWG). The goal of the work is to provide a solution path for integration of multiple optical devices on a single substrate from a thereto-mechanical as well as optical discipline point of view.
  • Keywords
    arrayed waveguide gratings; integrated optics; temperature control; temperature distribution; thermal management (packaging); arrayed waveguide gratings; closed-loop applications; integrated thin film heater; measurement results; modeling results; multiple optical devices; planar lightwave circuits; sensor; single substrate; temperature control; Arrayed waveguide gratings; History; Integrated circuit measurements; Optical devices; Optical waveguides; Planar waveguides; Temperature control; Thermal sensors; Thin film circuits; Thin film sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Thermal Measurement and Management Symposium, 2004. Twentieth Annual IEEE
  • ISSN
    1065-2221
  • Print_ISBN
    0-7803-8363-X
  • Type

    conf

  • DOI
    10.1109/STHERM.2004.1291322
  • Filename
    1320473