Design, Fabrication, and Characterization of Liquid Metal Microheaters

This paper reports design, fabrication, and characterization of liquid metal-based microheaters. Liquid metal microheaters designed via finite element simulation were fabricated by simply injecting eutectic gallium indium into polydimethylsiloxane (PDMS) microfluidic chips bonded to either silicon or PDMS substrates. Considering the net positive volume change of the microheater upon heating, both nonpressurized and pressurized contacts between the power supply and the liquid metal wires were investigated. The pressurized contact was found to provide more reliable electrical connection, thus more stable long-term operation than the nonpressurized contact. Due to higher thermal conductivity, liquid metal microheaters with silicon substrate exhibit better temperature uniformity than ones with PDMS substrate. However, liquid metal microheaters with PDMS substrate are flexible and deformable, thus more suitable than ones with silicon substrate when microheaters should be applied to nonflat objects.