DocumentCode

3278125

Title

The Effect of Nondilute Dopant-Defect Pair Concentrations on Arsenic Diffusion

Author

Novell, Paul ; Law, Mark E.

Author_Institution

University of Florida

fYear

1992

fDate

31 May-1 Jun 1992

Firstpage

41

Lastpage

44

Keywords

Nonlinear equations; Oxidation; Semiconductor process modeling; Temperature dependence; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Numerical Modeling of Processes and Devices for Integrated Circuits, 1992. NUPAD IV. Workshop on

Print_ISBN

0-7803-0516-7

Type

conf

DOI

10.1109/NUPAD.1992.673844

Filename

673844