Title :
Dispersion and attenuation characteristics of Suspended Microstrip line on multilayer lossy silicon substrate at 60 GHz
Author :
Prasad, Manish ; Gaur, Arun Singh ; Sharma, Vivek Kr ; Pathak, Nagendra P.
Author_Institution :
Dept. of Electron.&Comput. Eng., Indian Inst. of Technol., Roorkee
Abstract :
In this paper, transmission line parameters such as characteristic impedance Z0, effective dielectric constant epsiveff, attenuation constant alpha of Suspended Microstrip line on multilayer low resistivity silicon substrate are investigated. Effect of variation in the thickness of Si3N4, polyimide and metal layer are studied using HFSS. Due to suspended nature, significant reduction in transmission loss is observed in the simulation.
Keywords :
dispersion (wave); electric impedance; elemental semiconductors; microstrip lines; multilayers; permittivity; polymers; silicon; silicon compounds; substrates; transmission lines; HFSS; Si; Si3N4; attenuation characteristics; attenuation constant; characteristic impedance; dielectric constant; dispersion characteristics; frequency 60 GHz; high-frequency structure simulator; metal layer; microstrip line; multilayer lossy silicon substrate; multilayer low resistivity silicon substrate; polyimide layer; transmission line parameters; transmission loss; Attenuation; Conductivity; Dielectric constant; Dielectric substrates; Impedance; Microstrip; Nonhomogeneous media; Polyimides; Silicon; Transmission lines; CMOS grade Silicon; CMOS millimeter wave integrated circuits; Discontinuities; Dispersion; Equivalent Circuits; Multilayer Suspended Microstrip Line;
Conference_Titel :
Infrared, Millimeter and Terahertz Waves, 2008. IRMMW-THz 2008. 33rd International Conference on
Conference_Location :
Pasadena, CA
Print_ISBN :
978-1-4244-2119-0
Electronic_ISBN :
978-1-4244-2120-6
DOI :
10.1109/ICIMW.2008.4665716
