Title :
Observation of semiconductor test circuits after building-in defect using laser THz emission microscope
Author :
Yamashita, Masatsugu ; Otani, Chiko ; Matsumoto, Toru ; Miura, Katsuyoshi ; Nakamae, Koji ; Tonouchi, Masayoshi ; Nikawa, Kiyoshi
Author_Institution :
RIKEN, Sendai
Abstract :
To evaluate the performance for non-contact testing of large scale integrated circuits, we observed various simple test circuits after build-in defect using laser THz emission microscope (LTEM), which detects THz wave amplitude emitted from semiconductor test circuits excited by focused ultrafast laser pulses.
Keywords :
high-speed optical techniques; integrated circuit testing; large scale integration; laser beams; monolithic integrated circuits; optical microscopy; photoexcitation; terahertz wave detectors; THz wave amplitude; focused ultrafast laser pulses; large scale integrated circuits; laser THz emission microscope; semiconductor test circuits; Circuit testing; Integrated circuit testing; Large scale integration; Laser excitation; Microscopy; Microwave integrated circuits; Optical pulses; Pulse circuits; Semiconductor device testing; Semiconductor lasers;
Conference_Titel :
Infrared, Millimeter and Terahertz Waves, 2008. IRMMW-THz 2008. 33rd International Conference on
Conference_Location :
Pasadena, CA
Print_ISBN :
978-1-4244-2119-0
Electronic_ISBN :
978-1-4244-2120-6
DOI :
10.1109/ICIMW.2008.4665726
