Electrical characterization of a carbon nanoelectrode instrumented nanopore sensor

This is the first report of a transverse carbon nanoelectrode for sensing translation events through a solid state nanopore. This device has application to the study of molecular transport and DNA sequencing. The device is fabricated on a silicon nitride membrane using electron beam stimulated oxidation of carbon (EBSOC) to first create a carbon nanowire. The nanowire is then encapsulated in a top layer of silicon nitride. A nanopore is then milled through both the silicon nitride membrane and carbon nanowire using a high energy transmission electron microscope (TEM) or a focused ion beam (FIB). This creates a pair of electrodes that are self-aligned to the nanopore. With state-of-the-art FIB techniques pores and electrode gaps ¿ 10 nm are achieved. In this report the results of electrical testing of a device with a 25 nm pore are presented, including current-voltage characterization in air and the detection of a nanoparticle translocating the nanopore in solution.