Title :
The Thermodynamic Model as Common Base for Modeling Integrated Microsensors and Smart Electronic Devices
Author :
Wachutka, Gerhard
Author_Institution :
ETH-Honggerberg
fDate :
31 May-1 Jun 1992
Keywords :
Actuators; Chemical sensors; Equations; Integrated circuit modeling; Magnetosphere; Microsensors; Object oriented modeling; Signal processing; Space technology; Thermodynamics;
Conference_Titel :
Numerical Modeling of Processes and Devices for Integrated Circuits, 1992. NUPAD IV. Workshop on
Print_ISBN :
0-7803-0516-7
DOI :
10.1109/NUPAD.1992.673849
